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Advanced Optical Inspection Technology Forum (Finished)
Time:2024-09-12
Venue:1A, 2nd Floor, Hall 1
Language:CN

Organizer

The Committee of Optical Manufacturing Technologies, The Chinese Optical Society

Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University

China International Optoelectronic Expo (CIOE)  


Cooperation 

Beijing Institute of Technology

In the era of intelligent manufacturing, optical detection plays a vital role. In the industrial manufacturing process, optical inspection ensures the stability of product quality, accuracy and performance, laying the foundation for the advent of the era of intelligent manufacturing. With the continuous expansion of the global semiconductor industry capacity, the demand for semiconductor equipment has shown a rapid growth trend, which has driven the market demand for testing and measurement equipment. As the world's largest semiconductor equipment market, China's dependence on test and measurement equipment will continue to increase. The mainstream semiconductor process is developing to a smaller scale, from 28nm, 14nm to 10nm, 7nm progress, some advanced semiconductor manufacturers have achieved the mass production of 5nm process and began to develop 3nm process. New technologies such as 3D FinFET transistors and 3D NAND have gradually become the mainstream of the industry.

However, with the continuous progress of the process, the number of product process steps increases, the microstructure is complicated, and the production cost increases exponentially. In order to obtain higher wafer yield, the process consistency between wafers and on the same wafer must be strictly controlled. This undoubtedly puts forward higher requirements for quality control. In the future, inspection and measurement equipment will need to be continuously optimized on key indicators such as sensitivity, accuracy, stability, and throughput to ensure that each process falls within the allowable process window, thus ensuring the smooth and continuous operation of the entire production line. This demand has promoted the continuous innovation and development of related equipment technology, but also brought great challenges and opportunities to the field of quality control.

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Conference agenda

Advanced Optical Inspection Technology Forum (Finished)
TimeTopicsSpeakers
Session 1: Optical Semiconductor Testing
Host: Min Xu, Professor, Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University
10:00-10:05Opening
10:05-10:25AI Powered High Sensitivity Metrology Boost YieldXuena Zhang, Chairwoman、CTO, Shenzhen Angstrom Semiconductor Technology Co., Ltd.
10:25-10:45High-Performance Manufacture and Optical InstrumentMin Xu, Professor, Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University.
10:45-11:05Application of Machine Vision in The Dimensional Management of Semiconductor IndustryZhiwei Wang, Metrology Dept Chief Product Officer, TZTEK Technology Co., Ltd.
11:05-11:25Defect Inspection Technologies for Compound SemiconductorsZhouling Wu, Chief Scientist, ZC Optoelectronic Technologies. LTD.
11:25-11:45Ultra High Precision Semiconductor Inspection LensJulia Zhao, Chief Technology Officer, Quancool Intelligent Technology Co., Ltd.
Lunch&Break
Session 2: Spectral Detection Technology
Host:Nan Zhang, Professor, Beijing Institute of Technology
14:00-14:05Opening
14:05-14:25Metaoptics Enabled Multi-Dimensional Imaging DetectionFei Yi, Professor, Huazhong University of Science and Technology, School of Optical and Electronic Information.
14:25-14:45Multi-Dimensional Light Field Detection: From Spectrum to Depth SpectrumJing Cui, General Manager, Ideaoptics Inc.
14:45-15:05Specim Hyperspectral Imaging Technology and Related Application ScenariosAustin Zhang, China Area Sales Manager, Specim.
15:05-15:25On-Chip Computational Hyperspectral Imaging with High Spatial and Temporal ResolutionLiheng Bian, Professor, Beijing Institute of Technology.
15:25-15:45Take Light as A Ruler, Measure Everything - Let The Machine See The WorldYaoliang Zhong, Regional Manager, South China, Shining 3D Tech Co., Ltd.
15:45-16:05Innovative Black Silicon Photodiode Technology and Its Potential ApplicationsDr. Fan Ji, Program Manager, ElFys, Inc.
16:05-16:25Development and Application Prospects of On-Chip Spectral Imaging TechnologyWayne Wang, Founder/Chairman/CEO, Beijing Seetrum Technology Co., Ltd.
16:25-16:45Bridging UV-VIS to NIR for Semiconductor MetrologyJamie Zhou, Associate Product Manager, Carl Zeiss (Shanghai) Co., Ltd.

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