In the era of intelligent manufacturing, optical detection plays a vital role. In the industrial manufacturing process, optical inspection ensures the stability of product quality, accuracy and performance, laying the foundation for the advent of the era of intelligent manufacturing. With the continuous expansion of the global semiconductor industry capacity, the demand for semiconductor equipment has shown a rapid growth trend, which has driven the market demand for testing and measurement equipment. As the world's largest semiconductor equipment market, China's dependence on test and measurement equipment will continue to increase. The mainstream semiconductor process is developing to a smaller scale, from 28nm, 14nm to 10nm, 7nm progress, some advanced semiconductor manufacturers have achieved the mass production of 5nm process and began to develop 3nm process. New technologies such as 3D FinFET transistors and 3D NAND have gradually become the mainstream of the industry.

However, with the continuous progress of the process, the number of product process steps increases, the microstructure is complicated, and the production cost increases exponentially. In order to obtain higher wafer yield, the process consistency between wafers and on the same wafer must be strictly controlled. This undoubtedly puts forward higher requirements for quality control. In the future, inspection and measurement equipment will need to be continuously optimized on key indicators such as sensitivity, accuracy, stability, and throughput to ensure that each process falls within the allowable process window, thus ensuring the smooth and continuous operation of the entire production line. This demand has promoted the continuous innovation and development of related equipment technology, but also brought great challenges and opportunities to the field of quality control.